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Method

Solver Cells per λ Group delay (GD, GDD)

Materials

Name

A constant index or a dispersive profile from the library (AstraLayer, refractiveindex.info). The incident medium is taken without absorption; the substrate too, as a half-space — set it as a plate of a thickness to count its absorption k(λ) and its back face.

Film stack

Material

Thickness, nm

Layer 1 is next to the substrate.

Pattern

Lattice Period x, nm Period y, nm Height, nm Background Placement

Shapes

Illumination

λ from, nm λ to, nm Points Angle θ, ° Azimuth φ, ° Polarization Orders kept ±m_x Orders kept ±m_y

Diffraction efficiency

Compare

Unit cell

Top view

Cross-section y = Λ_y/2

Angular map

order , ± °

RCWA and FDTD

The device by both methods, drawn together

Method Cells per λ Wavelengths

Robustness

Does the design survive the errors of a real process?

σ film thickness, nm σ film thickness, % σ pattern height, nm σ shape size, nm σ period, nm Tests Acceptance Corridor on the chart

Yield—

Verdict—

Nominal deviation—

90 % of designs within—

Deviations are in tolerance units: 1 is the edge of the tolerance.

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Diffraction efficiency

Group delay

Unit cell

Angular map

RCWA and FDTD

Robustness

Sensitivity: share of the spread

Materials library

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